產品

高週波電源及整合器

我們將依客戶系統的需求與原廠交流，客製化地提供符合需求的高週波電源及相對應的整合器。我們提供的設備廣泛應用在半導體加工中的蝕刻製程，並設有國內維修服務，快速應對提高便利性。

產品介紹

項目 Advanced Types
General Specifications 　
Output Frequency 13.56MHz, 27.12MHz, 40.68MHz, 60MHz
Maximum Output Power (50ohm VSWR 1:1) 500W 1,000W 3,000W 5,000W
Output Power Stability (50ohm VSWR 1:1) ±1% of setting points or ±3W whichever is greater
Output Linearity (50ohm VSWR 1:1) ±1% of setting output or ±2W whichever is greater
Output Power Range 5～500W 10～1000W 30～3000W 50～5000W
Output Power Control Mode Forward power/Load power control selectable
Setting Power Resolution 1W
Reflected Power Limit 100W(20%) 200W(20%) 600W(20%) 1000W(20%)
Frequency Stability ±0.01%
Variable Frequency Range ±5%
Frequency Tuning Function Equipped